fa مهندسی کنترل شده ساختار و گاف نواری در نانوساختارهای سولفید تنگستن از طریق پلاسما نانو ساختار Nano structure پژوهشي Research <span style="font-size:11pt"><span style="line-height:normal"><span style="direction:rtl"><span style="unicode-bidi:embed"><span calibri="" style="font-family:"><span b="" class="fontstyle01" nazanin="" style="font-family:"><span style="color:black"><span style="font-weight:bold"><span style="font-style:normal"><span lang="AR-SA" style="font-size:14.0pt">چکیده</span></span></span></span></span></span></span></span></span></span><br> <span style="font-size:11pt"><span style="line-height:150%"><span style="direction:rtl"><span style="unicode-bidi:embed"><span calibri="" style="font-family:"><span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">در این پژوهش، نانوساختارهای دوبعدی سولفید تنگستن</span></span></span><span dir="LTR" style="font-size:12.0pt"><span style="line-height:150%"><span new="" roman="" style="font-family:" times="">&nbsp;)</span></span></span><span dir="LTR" new="" roman="" style="font-family:" times="">WS₂</span><span dir="LTR" style="font-size:12.0pt"><span style="line-height:150%"><span new="" roman="" style="font-family:" times="">(&nbsp;</span></span></span><span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">به روش رسوب‌دهی بخار شیمیایی گرمایی</span></span></span><span dir="LTR" new="" roman="" style="font-family:" times=""> (TCVD)</span> &nbsp;<span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">در دمای </span></span></span><span dir="LTR" new="" roman="" style="font-family:" times="">&deg;<span style="color:black">C</span></span> <span b="" lang="AR-SA" nazanin="" style="font-family:">1100</span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">، با گاز حامل آرگون به شار حجمی استاندارد </span></span></span>&nbsp;<span dir="LTR" style="font-size:12.0pt"><span style="line-height:150%"><span new="" roman="" style="font-family:" times="">sccm </span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۱۵۰</span> &nbsp;<span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">، بر روی زیرلایه‌های سیلیکونی در یک کوره سه</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">‌ناحیه‌ای و طی </span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۶۰</span><span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:"> دقیقه رشد داده شدند. نمونه‌های حاصل به مدت </span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۱۰</span><span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:"> دقیقه در معرض پلاسما با توان </span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۷۰</span><span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:"> وات و شارش آرگون به میزان </span></span></span><span dir="LTR" style="font-size:12.0pt"><span style="line-height:150%"><span new="" roman="" style="font-family:" times="">sccm</span></span></span> <span b="" lang="FA" nazanin="" style="font-family:">۵</span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">قرار گرفتند. هدف این مطالعه، بررسی اثر پلاسما بر ساختار بلوری و خواص نوری</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">سولفید تنگستن</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">است. نتایج پراش اشعه ایکس</span></span></span> <span dir="LTR" new="" roman="" style="font-family:" times="">(XRD) </span>&nbsp;<span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">نشان داد که قله شاخص (</span></span></span><span b="" lang="AR-SA" nazanin="" style="font-family:">002</span><span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">) در زاویه </span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۱۴</span><span lang="FA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:"> درجه</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">پس از پلاسما شدت بیشتری یافت که بیانگر بهبود جهت گیری و آرایش لایه‌ها و کاهش فازهای ثانویه است. طیف‌سنجی رامان، کاهش شدت پیک</span></span></span> &nbsp;<span dir="LTR" new="" roman="" style="font-family:" times="">E₂g</span> &nbsp;<span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">در </span></span></span><span dir="LTR" style="font-size:12.0pt"><span style="line-height:150%"><span new="" roman="" style="font-family:" times="">&nbsp;cm⁻&sup1;</span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۳۴۲</span> &nbsp;<span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">و افزایش نسبت</span></span></span> <span dir="LTR" new="" roman="" style="font-family:" times="">I(A₁g)/I(E₂g)</span> &nbsp;<span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">را نشان داد که تأییدی بر کاهش تعداد لایه‌ها است. در طیف</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">سنجی جذب فرابنفش- مرئی (</span></span></span><span dir="LTR" new="" roman="" style="font-family:" times="">UV-Vis</span><span b="" lang="AR-SA" nazanin="" style="font-family:">)</span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">نیز جابه‌جایی قله اکسایتونی</span></span></span> <span dir="LTR" new="" roman="" style="font-family:" times="">A</span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">از </span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۶۳۰</span><span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:"> به </span></span></span><span b="" lang="FA" nazanin="" style="font-family:">۶۲۴</span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">نانومتر</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">مشاهده شد که نشان‌دهنده افزایش گاف نواری و کاهش ضخامت لایه‌ها می‌باشد. این یافته‌ها نشان می‌دهد که پلاسما روشی مؤثر برای مهندسی لایه‌ها و بهینه‌سازی خواص</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">سولفید تنگستن</span></span></span> <span lang="AR-SA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:">در کاربردهای نوری و الکترونیکی است</span></span></span><span dir="LTR" style="font-size:12.0pt"><span style="line-height:150%"><span new="" roman="" style="font-family:" times="">.</span></span></span><span lang="FA" style="font-size:12.0pt"><span style="line-height:150%"><span b="" nazanin="" style="font-family:"><span style="color:black"></span></span></span></span></span></span></span></span></span><br> &nbsp; <span class="p" dir="ltr">In this study, two-dimensional tungsten disulfide (WS2) nanostructures were synthesized on silicon substrates via thermal chemical vapor deposition (CVD) at 1100 &deg;C, using argon as the carrier gas at a flow rate of 150 sccm for 60 minutes in a three-zone furnace. The as-grown samples were subsequently treated with direct current (DC) argon plasma at a power of 70 W and a flow rate of 5 sccm for 10 minutes. The objective was to examine the influence of plasma treatment on the structural and optical characteristics of WS2. X-ray diffraction (XRD) analysis revealed an enhancement in the intensity of the (002) diffraction peak at 14&deg;, suggesting improved crystallinity and reduced secondary phases. UV&ndash;Visible absorption spectroscopy indicated a blue shift of the excitonic A peak from 630 nm to 624 nm, corresponding to an increase in the band gap due to a reduction in layer number. Raman spectroscopy showed a decrease in the E2g peak intensity at 342 cm⁻&sup1; and an increased I(A₁g)/I(E2g) ratio, confirming layer thinning. These results demonstrate that plasma treatment is an effective approach for tailoring WS2 layer thickness and optimizing its properties for optoelectronic applications.</span> نانوساختارهای سولفید تنگستن , رسوب دهی بخار شیمیایی گرمایی, پلاسمای گاز آرگون WS2 nanostructures, Thermal chemical vapor deposition, Argon plasma 8 15 http://jicers.ir/browse.php?a_code=A-10-1938-1&slc_lang=fa&sid=1 mojtaba zolfi مجتبی زلفی mojtabazolfi677@gmail.com 10031947532846004053 10031947532846004053 No international university of imam khomeini دانشگاه بین المللی امام خمینی (ره) Zahra Mortazavi زهرا مرتضوی z.mortazavi@aut.ac.ir 10031947532846004054 10031947532846004054 Yes international university of imam khomeini دانشگاه امیرکبیر Ali Reyhani علی ریحانی reyhani@sci.ikiu.ac.ir 10031947532846004055 10031947532846004055 No international university of imam khomeini دانشگاه بین المللی امام خمینی (ره) parviz parvin پرویز پروین parvin@aut.ac.ir 10031947532846004056 10031947532846004056 No Amir kabir university دانشگاه صنعتی امیر کبیر